Graphene for VLSI: FET and Interconnect Applications

被引：0

作者：

Awano, Yuji ^{[1
]}

机构：

[1] Keio Univ, Kouhoku Ku, Yokohama, Kanagawa 2238522, Japan

来源：

2009 IEEE INTERNATIONAL ELECTRON DEVICES MEETING | 2009年

关键词：

CARBON NANOTUBES;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Because of their remarkable physical properties, graphene should be one of the most important Emerging Research Materials (ERM) for not only the front-end but also back-end devices of VLSIs for the next decade. In this paper, we discuss the present status of their material technologies and some issues to be addressed for realizing graphene channels and wiring devices for a future LSI.

引用

页码：212 / 215

页数：4

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