Sensors made of carbon ceramic composite materials

被引：5

作者：

Su, Chun-Hsi ^{[1
]}

Zhang, Zhe-Ming ^{[1
]}

机构：

[1] Natl Taipei Univ Technol, Inst Mechatron Engn, 1,Sec 3,Chung Hsiao E Rd, Taipei 10608, Taiwan

来源：

MATERIALS LETTERS | 2017年 / 197卷

关键词：

Microwave plasma jet; Carbon nanotubes; Ceramics; Composite materials; Accelerometer sensors;

D O I：

10.1016/j.matlet.2017.03.147

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Carbon nanotubes (CNTs) were deposited on barium titanate (BaTiO3) substrates using the microwave plasma jet chemical vapor deposition (MPJCVD) system. Accelerometer sensors were then made of both as-obtained carbon ceramic (CNTs/BaTiO3) composite materials and barium titanate (BaTiO3). The variations of the output voltages under various accelerating amplitudes were examined on two kinds of sensors at vibrating frequencies of 200 Hz, 500 Hz, 800 Hz, and 2000 Hz, respectively. It is found that the output voltages and the sensitivity of CNTs/BaTiO3 sensors were higher than those of BaTiO3 sensors at each vibrating frequency. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：90 / 93

页数：4

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