Simultaneous measurement of two parameters of the spherical lens by low-coherence interferometry

被引:0
|
作者
Sun, Ying [1 ]
Nomura, Takanori [2 ]
机构
[1] Wakayama Univ, Grad Sch Syst Engn, 930 Sakaedani, Wakayanma, Japan
[2] Wakayama Univ, Fac Syst Engn, 930 Sakaedani, Wakayanma, Japan
来源
OPTICAL DESIGN AND TESTING X | 2020年 / 11548卷
关键词
shape measurement; low-coherence interferometry;
D O I
10.1117/12.2573173
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To measure different parameters of a spherical lens simultaneously, a method by low-coherence interferometry with a low temporal coherent light source is proposed. This proposed method can obtain both the radius of curvature and the central thickness of a spherical lens in a single optical system. Owing to the property of low temporal coherence, the contrast of interference fringe pattern, hologram, varies with the optical path difference of an object beam and a reference beam. This enables the central thickness of the test lens to acquire with a Michelson interferometer. Simultaneously, the spherical shape of the test lens, namely the radius of curvature, can be obtained from a hologram which contains information of the wavefront curvature from the reflected beam of the spherical surface of the test lens.
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页数:6
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