Characterization of DLC coatings deposited by rf magnetron sputtering

被引：62

作者：

Chowdhury, S ^{[1
]}

Laugier, MT ^{[1
]}

Rahman, IZ ^{[1
]}

机构：

[1] Univ Limerick, Dept Phys, Mat & Surface Sci Inst, Limerick, Ireland

来源：

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY | 2004年 / 153卷

关键词：

DLC; rf magnetron sputtering; micro Raman; nanoindentation;

D O I：

10.1016/j.jmatprotec.2004.04.265

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work diamond-like carbon (DLC thin films have been deposited by rf magnetron sputtering in an argon gas filled chamber using graphite target under different substrate temperatures. The bonding property was characterized by micro Raman and estimated sp(3)/Sp(2) in DLC films. Raman spectra showed that sp(3)-bonded carbon fraction increases from 50 to 80 degreesC temperatures and an increase in the substrate temperature above 80 degreesC results in an increase in the sp(2) -bonded carbon atoms in DLC thin films. Mechanical properties namely, hardness and Young's modulus were determined by CSM(TM) nanohardness tester. The hardness (H) and Young's modulus (E) were found in the range of 11-22 and 110-160 GPa, respectively, at different substrate temperatures and increased with increase of substrate temperature up to 125 degreesC and decreased thereafter. These results indicate that substrate temperature has a strong influence on the bonding properties of the deposited films and the changes in bonding ratio (sp(3)/Sp(2)) were correlated with changes in the mechanical properties. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：804 / 810

页数：7

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