Servo-Integrated Patterned Media by Hybrid Directed Self-Assembly

被引：24

作者：

Xiao, Shuaigang ^{[1
]}

Yang, Xiaomin ^{[1
]}

Steiner, Philip ^{[1
]}

Hsu, Yautzong ^{[1
]}

Lee, Kim ^{[1
]}

Wago, Koichi ^{[1
]}

Kuo, David ^{[1
]}

机构：

[1] Seagate Technol, Media Res Ctr, Fremont, CA 94538 USA

来源：

ACS NANO | 2014年 / 8卷 / 11期

关键词：

block copolymer; directed self-assembly; overlay; servo integration; spinstand; bit-patterned media; BLOCK-COPOLYMERS; GRAPHOEPITAXY; LITHOGRAPHY; ARRAYS;

D O I：

10.1021/nn505630t

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A hybrid directed self-assembly approach is developed to fabricate unprecedented servo-integrated bit-patterned media templates, by combining sphere-forming block copolymers with 5 teradot/in.(2) resolution capability, nanoimprint and optical lithography with overlay control. Nanoimprint generates prepatterns with different dimensions in the data field and servo field, respectively, and optical lithography controls the selective self-assembly process in either field. Two distinct directed self-assembly techniques, low-topography graphoepitaxy and high-topography graphoepitaxy, are elegantly integrated to create bit-patterned templates with flexible embedded servo information. Spinstand magnetic test at 1 teradot/in.(2) shows a low bit error rate of 10(-2.43), indicating fully functioning bit-patterned media and great potential of this approach for fabricating future ultra-high-density magnetic storage media.

引用

页码：11854 / 11859

页数：6

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