Hyperbolic-tangent composition-graded InxGa1-xAs/GaAs (100) structures grown by molecular beam epitaxy

被引：1

作者：

Belio-Manzano, A. ^{[1
]}

Espinosa-Vega, L. I. ^{[1
]}

Cortes-Mestizo, I. E. ^{[2
]}

Mercado-Ornelas, C. A. ^{[1
]}

Perea-Parrales, F. E. ^{[1
]}

Gallardo-Hernandez, S. ^{[3
]}

Compean-Garcia, V. D. ^{[2
]}

Rosa, J. L. Regalado-de la ^{[4
]}

Castro-Camus, E. ^{[4
]}

Gorbatchev, A. Yu ^{[5
]}

Mendez-Garcia, Victor H. ^{[1
]}

机构：

[1] Univ Autonoma San Luis Potosi, Coordinat Innovat & Applicat Sci & Technol CIACYT, San Luis Potosi 78210, Mexico

[2] Univ Autonoma San Luis Potosi, Coordinat Innovat & Applicat Sci & Technol CIACYT, CONACYT, San Luis Potosi 78210, Mexico

[3] Ctr Invest & Estudios Avanzados IPN, Phys Dept, Mexico City 14470, Mexico

[4] Ctr Invest enOpt AC, Loma Bosque 115,Lomas Campestre, Leon 37150, Guanajuato, Mexico

[5] Univ Autonoma San Luis Potosi, Opt Commun Res Inst, Ave Karakorum 1470,Lomas 4a Secc, San Luis Potosi 78210, Mexico

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2022年 / 142卷

关键词：

Hyperbolic tangent; Metamorphic layer; Density dislocations; Molecular beam epitaxy; INDIUM SEGREGATION; BUFFER LAYERS; INGAAS; GAAS; INAS; RECONSTRUCTIONS; DISLOCATIONS; DIODES; INSB;

D O I：

10.1016/j.mssp.2022.106486

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The molecular beam epitaxial growth and physical properties of In graded-composition layers of InGaAs on GaAs (100) substrates varying nominal In concentration from 12 to 97% and vice versa is analyzed along the growth front. The substrate temperature was varied as the In concentration was changed in order to propitiate the near optimal growth conditions for the InGaAs alloy. Hyperbolic-tangent compositional gradients, from In-rich to Garich alloys and vice versa, observed RHEED patterns characteristic of a flat surface during the growth. The HRXRD patterns showed clear diffraction peaks associated with the In concentration alloy at which the graded sample started, followed by a characteristic plateau of graded layers. The occurrence of dislocations in hyperbolic tangent gradients that relieve the strain up to a certain thickness is explored, reaching a nominal or an averaged lattice constant.

引用

页数：6

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