Study on the generalized thermoelastic vibration of the optically excited semiconducting microcantilevers

被引：237

作者：

Song, Yaqin ^{[1
,2
,4
]}

Todorovic, Dragan M. ^{[3
,4
]}

Cretin, Bernard ^{[4
]}

Vairac, Pascal ^{[4
]}

机构：

[1] Xi An Jiao Tong Univ, Sch Aerosp, MOE Key Lab Strength & Vibrat, Xian 710049, Peoples R China

[2] Dalian Univ Technol, State Key Lab Struct Anal Ind Equipment, Dalian 116023, Peoples R China

[3] Univ Belgrade, Inst Multidisciplinary Res, Belgrade 11030, Serbia

[4] Univ Franche Comte, FEMTO ST, CNRS, ENSMM,UTSM, F-25044 Besancon, France

来源：

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES | 2010年 / 47卷 / 14-15期

基金：

中国国家自然科学基金;

关键词：

Photothermal; Thermoelasticitic wave; Plasma wave; Semiconducting microcantilever; Vibration; WAVES;

D O I：

10.1016/j.ijsolstr.2010.03.020

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

In this paper, the theory of coupled plasma, thermal and elastic wave was used to study the vibration of semiconducting microcantilevers during photothermal process. The generalized thermoelastic model was adopted, along with plasma wave model, to obtain the vibration response of semiconducting microcantilevers under periodical laser excitation. The influence of thermal relaxation time on the vibration was investigated. The conventional and generalized thermoelastic theories for the temperature and deflection of microcantilever were compared. The simulation results for the amplitude and phase versus the modulation frequency revealed that near resonance frequency the generalized hyperbolic thermoelastic model was more suitable to describe the vibration characterization of microcantilevers than the conventional thermoelstic model. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：1871 / 1875

页数：5

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