Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)

被引：2

作者：

Sanekata, Masaomi ^{[1
]}

Nishida, Hiroshi ^{[1
]}

Nakagomi, Yuki ^{[1
]}

Hirai, Yoshihiro ^{[1
,2
]}

Nishimiya, Nobuo ^{[1
]}

Tona, Masahide ^{[2
]}

Hirata, Naoyuki ^{[2
]}

Yamamoto, Hiroaki ^{[2
]}

Tsukamoto, Keizo ^{[2
]}

Ohshimo, Keijiro ^{[3
]}

Misaizu, Fuminori ^{[3
]}

Fuke, Kiyokazu ^{[4
]}

机构：

[1] Tokyo Polytech Univ, Fac Engn, Atsugi, Kanagawa 2430297, Japan

[2] Ayabo Corp, Anjo, Aichi 4460052, Japan

[3] Tohoku Univ, Grad Sch Sci, Dept Chem, Sendai 9808578, Japan

[4] Toyota Phys & Chem Res Inst, Nagakute, Aichi 4801192, Japan

来源：

PLASMA | 2021年 / 4卷 / 02期

基金：

日本学术振兴会;

关键词：

magnetron sputtering; HPPMS; MPPMS; DOMS; optical emission spectroscopy; delayed discharge; plasma diagnostics; DEPOSITION; COATINGS; HIPIMS; PLASMA; ENHANCEMENT; DC;

D O I：

10.3390/plasma4020018

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Modulated pulsed power magnetron sputtering (MPPMS) of titanium was investigated as a function of argon gas pressure using optical emission spectroscopy (OES). Delays in discharge and the formation of comb-like discharge current waveforms due to splitting and pulsing were observed with a decrease in pressure. This observation corresponds to the evolution from MPPMS condition to deep-oscillation-magnetron-sputtering (DOMS)-like condition by changing discharge gas pressure. The optical emission intensities of the ionic species (Ar+ and Ti+) increased as the comb-like current waveforms were formed with decreasing Ar pressure. This behavior showed a marked contrast to that of the neutral species (Ar and Ti). The Ar pressure dependence of OES was revealed to be due to the plasma build-up stage, which is the initial generation process of plasma discharge in pulsed dc magnetron sputtering, from the temporal profile for the atomic-line intensities of the optically emitting species in MPPMS and DOMS-like plasmas.

引用

页码：269 / 280

页数：12

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