A new program for the design of electron microscopes

被引：40

作者：

Lencova, Bohumila ^{[1
,2
]}

Zlamal, Jakub ^{[2
]}

机构：

[1] Inst Sci Instruments AS CR, Kralovopolska 147, Brno 61264, Czech Republic

[2] Brno Univ Technol, Fac Mech Engn, Inst Phys Engn, Brno 61969, Czech Republic

来源：

PROCEEDINGS OF THE SEVENTH INTERNATIONAL CONFERENCE ON CHARGED PARTICLE OPTICS (CPO-7) | 2008年 / 1卷 / 01期

关键词：

Finite element method; Electron lenses and deflectors; Computer-aided design; User interface;

D O I：

10.1016/j.phpro.2008.07.111

中图分类号：

O412 [相对论、场论]; O572.2 [粒子物理学];

学科分类号：

摘要：

The paper describes the basic features of a new program EOD (Electron Optical Design), primarily intended for the design of systems of electron lenses and deflectors for scanning and transmission electron microscopes. A very accurate first-order finite-element method in graded topologically regular meshes provides the fields. Electron optical properties can be analyzed from standard paraxial trajectories and aberration integrals for combined lens and deflection systems or, for a general system, from the results of very accurate ray-tracing. The advantage of EOD is that it includes a user-friendly interface, simplifying the output of results and the whole design procedure. EOD is used by undergraduate and postgraduate students at ISI and TU Brno. (C) 2008 Elsevier B. V. All rights reserved.

引用

页码：315 / 324

页数：10

共 15 条

[1] Compact low-energy electron microscope for surface imaging [J].