Three-dimensional evaluation of subsurface damage in optical glasses with ground and polished surfaces using FF-OCT

被引：21

作者：

Frank, Samson ^{[1
]}

Seiler, Michael ^{[1
]}

Bliedtner, Jens ^{[1
]}

机构：

[1] EAH Jena Univ Appl Sci, Dept SciTec, Carl Zeiss Promenade 2, D-07745 Jena, Germany

来源：

APPLIED OPTICS | 2021年 / 60卷 / 08期

关键词：

FUSED-SILICA OPTICS; COHERENCE TOMOGRAPHY; ROUGHNESS; MICROSCOPY; DEFECTS; PARAMETERS; MORPHOLOGY; DEPTH;

D O I：

10.1364/AO.413090

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Subsurface damage (SSD) induced during conventional manufacturing of optics contributes mainly to a reduction in the performance and quality of optics. In this paper, we propose the application of full-field optical coherence tomography (FF-OCT) as a high-resolution and nondestructive method for evaluation ofSSDin optical substrates. Both ground and polished surfaces can be successfully imaged, providing a path to control SSD throughout the entire optics manufacturing process chain. Full tomograms are acquired for qualitative and quantitative analyses of both surface and SSD. The main requirements for the detection of SSD are addressed. Data processing allows the removal of low-intensity image errors and the automatic evaluation of SSD depths. OCT scans are carried out on destructively referenced glass samples and compared to existing predictive models, validating the obtained results. Finally, intensity projection methods and depth maps are applied to characterize crack morphologies. The experiments highlight differences in crack characteristics between optical glasses SF6 and HPFS7980 and illustrate thatwet etching can enhance three-dimensional imaging ofSSDwith FF-OCT. (C) 2021 Optical Society of America

引用

页码：2118 / 2126

页数：9

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