Formation of InAs wires and dots on vicinal GaAs (110) surfaces with giant steps by molecular beam epitaxy

被引:10
作者
Torii, S [1 ]
Shim, BR [1 ]
Yasuda, H [1 ]
Maehashi, K [1 ]
Hasegawa, S [1 ]
Nakashima, H [1 ]
机构
[1] Osaka Univ, Inst Sci & Ind Res, Osaka 567, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1997年 / 36卷 / 12B期
关键词
quantum wire; quantum dot; molecular beam epitaxy; gallium arsenide (110); vicinal substrate; indium arsenide; atomic force microscopy; X-ray photoelectron spectroscopy; transmission electron microscopy;
D O I
10.1143/JJAP.36.L1645
中图分类号
O59 [应用物理学];
学科分类号
摘要
InAs are grown on vicinal GaAs (110) surfaces with giant steps using molecular beam epitaxy. Atomic force microscopy, X-ray photoelectron spectroscopy and transmission electron microscopy show that uniform and well-aligned InAs wires and dots are formed on the facets at giant step edges due to the accumulation of InAs. This accumulation is only observed in a relatively high growth temperature range (580-600 degrees C) and not at low temperatures.
引用
收藏
页码:L1645 / L1647
页数:3
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