Transparent Capacitive Micromachined Ultrasound Transducer Arrays for Multimodal Imaging Systems

被引:0
作者
Ilkhechi, Afshin Kashani [1 ]
Zemp, Roger [1 ]
机构
[1] Univ Alberta, Edmonton, AB T6G 2V4, Canada
来源
OPTO-ACOUSTIC METHODS AND APPLICATIONS IN BIOPHOTONICS V | 2021年 / 11923卷
关键词
D O I
10.1117/12.2615883
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
We introduce transparent TOBE CMUT arrays for multimodal imaging systems, combining ultrasound with photoacoustic and optical imaging systems. We designed and fabricated a 128-element lambda-pitch transducers with high transparency ranging from visible to near-infrared. (C) 2021 The Author(s)
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页数:3
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