共 35 条
[21]
PEICHEL D, 1998, THESIS U MINNESOTA M
[22]
Processing and characterization of piezoelectric materials and integration into microelectromechanical systems
[J].
ANNUAL REVIEW OF MATERIALS SCIENCE,
1998, 28
:563-597
[23]
ROBBINS WP, 1995, P 7 INT S INT FERR C
[26]
SZERI AZ, 1977, FLUID FILM LUBRICATI
[28]
Advances in an electrorheological fluid based tactile array
[J].
DISPLAYS,
1998, 18 (03)
:135-141
[29]
WEED HR, 1994, ENG SYSTEMS DESIGNS, V64
[30]
Wilcock D F, 1967, DESIGN GAS BEARINGS, V1, 2