Comparison of Scanning Evanescent Microwave Microscopy with Co-Planar Waveguide Methods of Characterization of Ba0.5Sr0.5TiO3 Thin Films

被引：0

作者：

Barker, D. J. ^{[1
]}

Suherman, P. M. ^{[1
]}

Jackson, T. J. ^{[1
]}

Lancaster, M. J. ^{[1
]}

机构：

[1] Univ Birmingham, Sch Elect Elect & Comp Engn, Birmingham B15 2TT, W Midlands, England

来源：

ISAF: 2009 18TH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS | 2009年

关键词：

DIELECTRIC-PROPERTIES;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The permittivity of a barium strontium titanate thin film was measured at 1.8 GHz and 4.4 GHz with a scanning evanescent microwave microscope (SEMM) and co-planer waveguides (CPW). The raw data suggests the SEMM has sufficient sensitivity to detect significant variations in permittivity across the film that the CPWs could not. The average value of permittivity extracted from the data is consistent with that extracted from the co-planar waveguide measurements but the error bars associated with the extraction are large, of the order of 25 %. The significant contribution to the error in the final result from the SEMM is due to the analytical model used.

引用

页码：236 / 241

页数：6

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