Three-dimensional micromachining by machine tools

被引：156

作者：

Masuzawa, T ^{[1
]}

Tonshoff, HK ^{[1
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Tokyo, Japan

来源：

CIRP ANNALS 1997 - MANUFACTURING TECHNOLOGY, VOLUME 46/2/1997: ANNALS OF THE INTERNATIONAL INSTITUTION FOR PRODUCTION ENGINEERING RESEARCH | 1997年

关键词：

micromachining; machine tool; microproduct;

D O I：

10.1016/S0007-8506(07)60882-8

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Machining technologies for three-dimensional microproducts are summarized by focusing on the methods using tools. After a discussion on the problems and the basic strategy concerning micromachining, promising methods for machining convex and concave shapes are introduced and discussed with respect to their state of the art. The methods introduced include WEDG, EDM, grinding, cutting, WECG, MEDM, microdrilling, micromilling, MUSM, micropunching, MLBM, electrolyte jet ECM, micro electroforming and micro injection molding.

引用

页码：621 / 628

页数：8