Two-photon direct laser writing of micro Fabry-Perot cavity on single-mode fiber for refractive index sensing

Using the two-photon polymerization (TPP) lithography, here we propose and experimentally demonstrate a fiber-tipped Fabry-Perot interferometer (FPI) for liquid refractive index (RI) measurement. To fit the aqueous environment, the FPI is designed as an open-cell microstructure consisting of well-crafted surfaces together with supporting rods, where the major spectral interference occurs between the waveguide's facet and the printed surface. Subsequently, the sensing performances of the fiber FPI are comprehensively studied under various RI as well as temperature configurations. The RI sensitivity is obtained to be 1058 nm/RIU with a low detection limit of 4.5x 10(-6) RIU, which is comparable to that of previous reported FPIs. And the temperature cross-sensitivity reaches a value of 8.2 x 10(-5) RIU/degrees C, indicating the good reliability for RI monitoring. Compared to other fiber FPIs, our sensor exhibits substantial advantages such as ease of fabrication, highly smooth cavity surfaces, and sufficient mechanical strength, providing a practical and competitive solution for chemical and biological sensing. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement