Minority carrier lifetime and diffusion length in Si1-x-yGexCy heterolayers

被引:10
作者
Samanta, SK [1 ]
Maikap, S [1 ]
Chatterjee, S [1 ]
Maiti, CK [1 ]
机构
[1] Indian Inst Technol Kharagpur, Dept Elect & ECE, Kharagpur 721302, W Bengal, India
关键词
generation lifetime; diffusion length; silicon germanium carbon (SiGeC);
D O I
10.1016/S0038-1101(02)00445-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The minority carrier lifetime and diffusion length have been measured in partially strain-compensated Si0.795Ge0.2C0.005 layers grown using ultrahigh vacuum chemical vapor deposition. A minority carrier lifetime greater than 1 mus has been observed. The data indicate that the minority carrier lifetimes are degraded due to carbon incorporation. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:893 / 897
页数:5
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