Intrinsic sheath edge conditions for sheath instability in low-pressure electronegative plasmas
被引:27
|
作者:
Kono, A
论文数: 0引用数: 0
h-index: 0
机构:
Nagoya Univ, Grad Sch Engn, Dept Elect, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Elect, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Kono, A
[1
]
机构:
[1] Nagoya Univ, Grad Sch Engn, Dept Elect, Chikusa Ku, Nagoya, Aichi 4648603, Japan
The conditions at the sheath edge that could lead to instability in the plasma-wall boundary in low-pressure electronegative plasmas are considered in a comprehensive manner. The relevant range of the ratio of the negative ion density to the electron density at the sheath edge was derived on the basis of a fluid model and it was clarified how the parameter range are affected by the positive and negative ion temperatures, by the geometries of plasmas (plane-parallel, cylindrical, and spherical), by the directions of the positive ion flow (converging or diverging), and by the effects of ionization and momentum transfer collisions. It was found that in any geometry the instability would be induced in conditions that could be realized without difficulty in low-pressure plasmas.
机构:
Dalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R ChinaDalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R China
Wang, ZX
Wang, XG
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R ChinaDalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R China
Wang, XG
Liu, JY
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R ChinaDalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R China
Liu, JY
Liu, Y
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R ChinaDalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Electron & Ion, Dalian 116024, Peoples R China