Temperature stability of surface acoustic wave resonators on the in-plane rotated 33°Y-cut quartz

被引：5

作者：

Kanna, S ^{[1
]}

Iizawa, K ^{[1
]}

Yamazaki, T ^{[1
]}

Takagi, N ^{[1
]}

机构：

[1] Seiko Epson Corp, Suwa, Nagano 3928502, Japan

来源：

2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2002年

关键词：

D O I：

10.1109/ULTSYM.2002.1193362

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We present surface acoustic wave resonators on the in-plane rotated 33degreesY-cut quartz with improved temperature stability. We calculate the frequency temperature characteristics of Rayleigh waves using finite element method under, the condition of Euler angle (0, 123, 39-44). We confirmed the accuracy of calculated temperature coefficients by experiments. We also measured the resonance characteristics of prototype SAW resonators.

引用

页码：101 / 104

页数：4

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