Polar ceramics in rf-MEMS and microwave reconfigurable electronics: A brief review on recent issues

被引：4
|
作者：
Setter, N [1 ]
Sherman, V [1 ]
Astafiev, K [1 ]
Tagantsev, AK [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland
来源：
JOURNAL OF ELECTROCERAMICS | 2004年 / 13卷 / 1-3期
关键词：
ferroelectric; tunable; microwave; AlN; BST; piezoelectric; bulk acoustic waves; rf switch; rf-MEMS;
D O I：
10.1007/s10832-004-5101-3
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Properties and fabrication status of microdevices for microwaves based on polar ceramics are reviewed. We discuss bulk acoustic wave devices with AlN films, rf-MEMS capacitive switches with high permittivity materials, and tunable ferroelectrics. The relevant properties of ferroelectrics for microwave applications are summarized with emphasis on composites and thin films.
引用
收藏
页码：215 / 222
页数：8
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