MEMS piezoelectric acoustic transducer

被引：2

作者：

Wu Xiaoming ^{[1
]}

Yang Yi ^{[1
]}

Zhu YiPing ^{[1
]}

Zhang NinXing ^{[1
]}

Ren Tianling ^{[1
]}

Liu Litian ^{[1
]}

机构：

[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China

来源：

INTEGRATED FERROELECTRICS | 2007年 / 89卷

关键词：

acoustic transducers; MEMS; piezoelectric;

D O I：

10.1080/10584580601077716

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the fabrication process and measurement results of microelectromechanical (MEMS) piezoelectric acoustic transducers. To increase the output sound pressure, a dome-shaped multi-layer diaphragm is designed and fabricated by adjusting the residual stress in the individual layers. Transducers work in either audio or ultrasonic frequency range if diaphragm is designed in different size. In the frequency range from 100 Hz to 7 kHz, the output sound pressure of audio transducers with 3 mm x 3 mm diaphragm is higher than 0.1 Pa. The maximum output reaches 1.1 Pa at 3.8 kHz. For ultrasonic transducers with I mm x I mm diaphragm, the maximum output is 1.26 Pa at resonant frequency of 54 kHz. All transducers show acceptable linearity over a wide range of input drive voltage.

引用

页码：150 / 159

页数：10

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