Deposition of crack-free BaTiO3 and Pb(Zr,Ti)O3 films over 1 μm thick via single-step dip-coating

被引：0
作者：
Kozuka, H [1 ]
Kajimura, M [1 ]
Katayama, K [1 ]
Isota, Y [1 ]
Hirano, T [1 ]
机构：
[1] Kansai Univ, MSE Dept, Suita, Osaka 5648680, Japan
来源：
CHEMICAL PROCESSING OF DIELECTRICS, INSULATORS AND ELECTRONIC CERAMICS | 2000年 / 606卷
关键词：
D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
BaTiO3 and PZT films were prepared by single-step dip-coating tom alkoxide-acetate solutions containing polyvinylpyrrolidone (PVP). Crack-free BaTiO3 and PZT films over 1 mu m in thickness were obtained via single-step deposition. Stepwise hearing of the gel films was found to improve densification of BaTiO3 films, reducing the thickness and increasing the optical transmittance, which was not, however, the case with PZT films, where the stepwise heating rather induced crack formation, leading to degraded transmittance. Residual stress was evaluated on spin-coating BaTiO3 films by measuring the substrate curvature, where a significant reduction in tensile stress was found to be caused by PVP.
引用
收藏
页码：187 / 192
页数：6
相关论文
共 50 条
  • [21] Dielectric properties of (100) textured thick Pb(ZrxTi1-x)O3 films with different Zr/Ti atom ratios
    Cheng, JR
    Zhu, WY
    Li, N
    Cross, LE
    JOURNAL OF APPLIED PHYSICS, 2002, 91 (09) : 5997 - 6001
  • [22] Dielectric properties of (100) textured thick Pb(ZrxTi 1-x)O3 films with different Zr/Ti atom ratios
    Cheng, Jinrong
    Zhu, Wenyi
    Li, Nan
    Cross, L. Eric
    Journal of Applied Physics, 2002, 91 (09): : 5997 - 6001
  • [23] Single crystal-like selection rules for unipolar-axis oriented tetragonal Pb(Zr,Ti)O3 thick epitaxial films
    Nakajima, Mitsumasa
    Fujisawa, Takashi
    Ehara, Yoshitaka
    Yamada, Tomoaki
    Funakubo, Hiroshi
    Naganuma, Hiroshi
    Okamura, Soichiro
    Nishida, Ken
    Yamamoto, Takashi
    Osada, Minoru
    APPLIED PHYSICS LETTERS, 2010, 97 (11)
  • [24] High performance screen printed Pb(Zr0.46Ti0.54)O3 - Pb(Zn1/3Nb2/3) O3-Pb(Ni1/3Nb2/3)O3 thick films by one-step co-firing method
    Wang, Mingyang
    Ma, Weibing
    Chen, Nan
    Guo, Yaoxian
    Ma, Jianqiang
    Zhao, Zhihao
    MATERIALS LETTERS, 2015, 152 : 17 - 20
  • [25] Processing and characterization of Pb(Zr, Ti)O3 thick films on platinum-coated silicon substrate derived from sol-gel deposition
    Wang, ZH
    Zhao, CL
    Zhu, WG
    Tan, OK
    Liu, WG
    Yao, X
    MATERIALS CHEMISTRY AND PHYSICS, 2002, 75 (1-3) : 71 - 75
  • [26] Piezoelectric properties and poling effect of Pb(Zr,Ti)O3 thick films prepared for microactuators by aerosol deposition (vol 77, pg 1710, 2000)
    Akedo, J
    Lebedev, M
    APPLIED PHYSICS LETTERS, 2001, 79 (26) : 4458 - 4458
  • [27] High-speed optical microscanner driven with resonation of lam waves using Pb(Zr,Ti)O3 thick films formed by aerosol deposition
    Akedo, J
    Lebedev, M
    Sato, H
    Park, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (9B): : 7072 - 7077
  • [28] High-speed optical microscanner driven with resonation of lam waves using Pb(Zr,Ti)O3 thick films formed by aerosol deposition
    Akedo, Jun
    Lebedev, Maxim
    Sato, Harumichi
    Park, Jaehyuk
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2005, 44 (9 B): : 7072 - 7077
  • [29] Low-temperature deposition of Pb(Zr,Ti)O3 thin films on Si substrates using Ba(Mg1/3Ta2/3)O3 as buffer layer
    Chu, YH
    Liang, CW
    Lin, SJ
    Liu, KS
    Lin, IN
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (8A): : 5409 - 5413
  • [30] The free-standing multilayer thick films of 0.7Pb(Zr0.46Ti0.54)O3–0.1Pb(Zn1/3Nb2/3)O3–0.2Pb(Ni1/3Nb2/3)O3 with low co-fired temperature
    Jifeng Gao
    Weibing Ma
    Yixuan Yang
    Jingdong Guo
    Huaidang Zhao
    Minjie Ma
    Journal of Materials Science: Materials in Electronics, 2018, 29 : 11664 - 11671
12345