Deposition of crack-free BaTiO3 and Pb(Zr,Ti)O3 films over 1 μm thick via single-step dip-coating

被引：0
作者：
Kozuka, H [1 ]
Kajimura, M [1 ]
Katayama, K [1 ]
Isota, Y [1 ]
Hirano, T [1 ]
机构：
[1] Kansai Univ, MSE Dept, Suita, Osaka 5648680, Japan
来源：
CHEMICAL PROCESSING OF DIELECTRICS, INSULATORS AND ELECTRONIC CERAMICS | 2000年 / 606卷
关键词：
D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
BaTiO3 and PZT films were prepared by single-step dip-coating tom alkoxide-acetate solutions containing polyvinylpyrrolidone (PVP). Crack-free BaTiO3 and PZT films over 1 mu m in thickness were obtained via single-step deposition. Stepwise hearing of the gel films was found to improve densification of BaTiO3 films, reducing the thickness and increasing the optical transmittance, which was not, however, the case with PZT films, where the stepwise heating rather induced crack formation, leading to degraded transmittance. Residual stress was evaluated on spin-coating BaTiO3 films by measuring the substrate curvature, where a significant reduction in tensile stress was found to be caused by PVP.
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页码：187 / 192
页数：6
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