Industrial simulation and Petri net simulation for the design of an automation structure for semiconductor fabrication

被引：0

作者：

Westphal, H ^{[1
]}

Zimmermann, A ^{[1
]}

机构：

[1] Univ Magdeburg, Inst Autom Technol, D-39016 Magdeburg, Germany

来源：

SIMULATION IN INDUSTRY'99: 11TH EUROPEAN SIMULATION SYMPOSIUM 1999 | 1999年

关键词：

manufacturing execution system (MES); automated material handling system (AMHS); industrial simulation; Petri nets; semiconductor manufacturing;

D O I：

暂无

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

The paper deals with simulation and optimization of a subset of AMDs Fab30 automation structure, a modern semiconductor fabrication (fab). The task of this industrial - academic collaboration the evaluation of the use of Petri net techniques in order to improve industrial simulation tools. The paper is organized as follows. Section 3 motivates the work. Section 4 introduces a semiconductor manufacturing execution system (MES). Section 5 informs some industrial simulation strategies and Section 6 shows a Petri net based simulation strategy of a subset of a MES. Section 7 concludes the paper with a brief discussion of both strategies.

引用

页码：723 / 727

页数：5

共 9 条

[1]

*AMD SAX MAN GMBH, 1999, 30 AMD SAX MAN GMBH

[2]

*AUT, AUT AUT TECHR

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IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1997, 10 (03) :360-369

[5]

Westphal H, 1998, IEEE SYS MAN CYBERN, P669, DOI 10.1109/ICSMC.1998.725490

[6]

WESTPHAL H, 1999, 14 IFAC WORLD C BEIJ, P467

[7]

WESTPHAL H, 1998, 24 ANN C IEEE IND EL

[8]

WESTPHAL H, 1999, 11 EUR SIM S EXH ESS

[9]

ZIMMERMANN A, 1999, 7 IEEE INT C EM TECH

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