High production rate process of YBCO coated conductors by TFA-MOD process

被引：8

作者：

Teranishi, Ryo ^{[1
]}

Matsuda, Junko

Nakaoka, Koichi

Izumi, Teruo

Shiohara, Yuh

Mori, Nobuyuki

Mukaida, Masashi

机构：

[1] Kyushu Univ, Fukuoka 8190395, Japan

[2] ISTEC, Superconduct Res Lab, Tokyo 1350062, Japan

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2007年 / 17卷 / 02期

关键词：

coated conductors; growth rate; TFA-MOD process; YBCO;

D O I：

10.1109/TASC.2007.899412

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Influence of process conditions including water vapor partial pressure, gas flow rate and total annealing pressure on YBa2Cu3O7-y (YBCO) film growth has been investigated in order to clarify the YBCO growth mechanism and to increase the growth rate. YBCO films have been fabricated on a LaAlO3 substrate by metalorganic deposition (MOD) process using trifluoroacetates (TFA) as a solute source. It was found that the processing parameters such as high water partial pressure, high diffusion constants due to low total pressure, and high gas flow rate affect the YBCO growth rate. Furthermore, it was empirically suggested that the growth rate of the YBCO film was in proportion to both the square root of water partial pressure and gas flow rate and was in inverse proportion to the one sixth power of the total pressure. The YBCO growth rate of about 2 times as fast as the previous condition was achieved with high performance by optimizing the process parameters.

引用

页码：3317 / 3320

页数：4

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