Proposal of X-ray fluorescence analysis for solid-liquid interfaces and monitoring chemical plating processes

We proposed and investigated an X-ray fluorescence analysis that enables direct measurements at solid-liquid interfaces, which is generally used in. the laboratory. A newly developed XRF device can be inserted into the solution. The top of the XRF device was covered with a polyimide film to prevent the solution from entering into the device. A quantitative analysis of the method was evaluated by using metal ionic solutions. The lower detection limit of the method was obtained in the range of ppm order. The analysis depth in the liquid phase was about I rum, by measuring the solid sample in liquid phase. It enables simultaneous measurements of both liquid samples and solid samples. A time-resolved measurement of Ni electroless plating was performed for the application of solid-liquid interfaces. It was confirmed that this method was able to be applied to monitoring of the plating processes.