Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon

被引：16

作者：

Larruquert, JI ^{[1
]}

Keski-Kuha, RAM ^{[1
]}

机构：

[1] NASA, Goddard Space Flight Ctr, Greenbelt, MD 20771 USA

来源：

OPTICS COMMUNICATIONS | 2000年 / 183卷 / 5-6期

关键词：

thin films; optical properties; reflectivity; far UV radiation; extreme UV radiation; optical constants; carbon films;

D O I：

10.1016/S0030-4018(00)00884-1

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Reflectance measurements of ion-beam-deposited (IBD) C films were performed in the extreme ultraviolet (EUV) spectral region from 49 to 200 nm. Near normal incidence reflectance of LED C films was determined to be higher than that of evaporated C films but lower than that of diamond. Optical constants of IBD C films were obtained from reflectance measurements as a function of the angle of incidence in the spectral range 49.0-121.6 nm. The relatively high reflectance of IBD C films in the spectral region 49-92 nm and its stability when stored in a desiccator make it an interesting coating material for the EUV. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：437 / 443

页数：7

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