Development and application of a compact broadband laser-plasma EUV source

被引：0
|
作者：
Koch, L. [1 ]
Wellegehausen, B. [1 ]
机构：
[1] Leibniz Univ Hannover, Inst Quantenopt, Hannover, Germany
来源：
X-RAY LASERS 2006, PROCEEDINGS | 2007年 / 115卷
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
An incoherent compact broadband (ca. 10 nm to 50 nm) laser-plasma EUV source was developed, witch consists of a small-sized 20 mJ diode-pumped Nd:YAG laser and a cylindrical target with galvanic gold coating.
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页码：523 / +
页数：2
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