Fabrication and test of a micro electromagnetic actuator

被引：44

作者：

Kim, KH ^{[1
]}

Yoon, HJ ^{[1
]}

Jeong, OC ^{[1
]}

Yang, SS ^{[1
]}

机构：

[1] Ajou Univ, Sch Elect Engn, Suwon 442749, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 117卷 / 01期

基金：

欧洲研究理事会;

关键词：

electromagnetic actuator; parylene; flat; corrugated;

D O I：

10.1016/j.sna.2003.10.079

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the fabrication, test results and the finite element analysis of an electromagnetic micro actuator with three diaphragms that can be driven individually. The actuator consists of parylene diaphragms, spiral copper coils and permanent magnets. Parylene is waterproof and its Young's modulus is small compared with metals, silicon and silicon compounds. So, it is adequate for the actuator diaphragm of a micropump. The static and dynamic characteristic tests are performed. The static deflections of the flat diaphragm and the corrugated one are 15 and 30 mum at 1 Hz, respectively, when the input current amplitude is 100 mA and the duty ratio is 50%. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：8 / 16

页数：9

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