The origin of Bohm diffusion, investigated by a comparison of different modelling methods

被引：23

作者：

Bultinck, E. ^{[1
]}

Mahieu, S. ^{[2
]}

Depla, D. ^{[2
]}

Bogaerts, A. ^{[1
]}

机构：

[1] Univ Antwerp, Dept Chem, Res Grp PLASMANT, B-2610 Antwerp, Belgium

[2] Univ Ghent, Dept Solid State Sci, Res Grp DRAFT, B-9000 Ghent, Belgium

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2010年 / 43卷 / 29期

关键词：

MAGNETRON DISCHARGE; FLUCTUATIONS; PLASMA; FIELD;

D O I：

10.1088/0022-3727/43/29/292001

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

'Bohm diffusion' causes the electrons to diffuse perpendicularly to the magnetic field lines. However, its origin is not yet completely understood: low and high frequency electric field fluctuations are both named to cause Bohm diffusion. The importance of including this process in a Monte Carlo (MC) model is demonstrated by comparing calculated ionization rates with particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations. A good agreement is found with a Bohm diffusion parameter of 0.05, which corresponds well to experiments. Since the PIC/MCC method accounts for fast electric field fluctuations, we conclude that Bohm diffusion is caused by fast electric field phenomena.

引用

页数：5

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