Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates

被引:1
作者
Karade, Yogesh [1 ]
Madani-Grasset, Frederic [1 ]
Berger, Ruediger [3 ]
Csiba, Vojtech [4 ]
Rommel, Mathias [5 ]
Dietzel, Andreas [1 ,2 ]
机构
[1] Eindhoven Univ Technol, NL-5600 MB Eindhoven, Netherlands
[2] Holst Ctr, NL-5656 AE Eindhoven, Netherlands
[3] Max Planck Inst Polymer Res, D-55128 Mainz, Germany
[4] Biont Inc, Bratislava 84229, Slovakia
[5] Fraunhofer Inst Integrated Syst & Device Technol, D-91058 Erlangen, Germany
关键词
Polymer blend films; Phase separation;
D O I
10.1016/j.mee.2009.11.016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A technique for fabricating pre-pattern induced phase-separated polymer blend films is presented. The gold layer coated silicon substrates were bombarded with focused ion beams (FIB) to sputter away Au grains in the irradiated regions and expose silicon oxide surface underneath, thereby creating pre-patterns of relatively hydrophobic (Au)/hydrophilic (silicon oxide) regions. In the pre-patterned regions, the spin-coated films consisting of immiscible PS (polystyrene) and PtBA (poly-tert-butyl acrylate) blend exhibited phase separation induced by the underlying pre-patterns and formed two distinct ordered morphologies with periodicities much smaller than that of the pre-patterns. The influence of varying periodicities of the pre-patterned structures, blending ratios and spin-coating parameters on the resulting morphologies are presented. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:1569 / 1574
页数:6
相关论文
共 26 条
  • [1] Single-chain statistics in polymer systems
    Aksimentiev, A
    Holyst, R
    [J]. PROGRESS IN POLYMER SCIENCE, 1999, 24 (07) : 1045 - 1093
  • [2] Polymer phase separation on lattice patterned surfaces
    Andrew, Piers
    Huck, Wilhelm T. S.
    [J]. SOFT MATTER, 2007, 3 (02) : 230 - 237
  • [3] Accurate parameter extraction for the simulation of direct structuring by ion beams
    Beuer, S.
    Rommel, M.
    Lehrer, Ch.
    Platzgummer, E.
    Kvasnica, S.
    Bauer, A. J.
    Ryssel, H.
    [J]. MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) : 810 - 813
  • [4] Surface-induced structure formation of polymer blends on patterned substrates
    Böltau, M
    Walheim, S
    Mlynek, J
    Krausch, G
    Steiner, U
    [J]. NATURE, 1998, 391 (6670) : 877 - 879
  • [5] Breakdown of dynamic scaling in thin film binary liquids undergoing phase separation
    Chung, HJ
    Composto, RJ
    [J]. PHYSICAL REVIEW LETTERS, 2004, 92 (18) : 185704 - 1
  • [6] Nanopatterning of magnetic disks by single-step Ar+ ion projection
    Dietzel, A
    Berger, R
    Loeschner, H
    Platzgummer, E
    Stengl, G
    Bruenger, WH
    Letzkus, F
    [J]. ADVANCED MATERIALS, 2003, 15 (14) : 1152 - +
  • [7] ERMI B, 2002, MACROMOLECULES, V32, P2356
  • [8] Oriented nanometer surface morphologies by thermal relaxation of locally cross-linked and stretched polymer samples
    Karade, Yogesh
    Graf, Karlheinz
    Bruenger, Wilhelm H.
    Dietzel, Andreas
    Berger, Ruediger
    [J]. MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) : 797 - 801
  • [9] Determination of Cross-Link Density in Ion-Irradiated Polystyrene Surfaces from Rippling
    Karade, Yogesh
    Pihan, Sascha A.
    Bruenger, Wilhelm H.
    Dietzel, Andreas
    Berger, Ruediger
    Graf, Karlheinz
    [J]. LANGMUIR, 2009, 25 (05) : 3108 - 3114
  • [10] Periodic porous stripe patterning in a polymer blend film induced by phase separation during spin-casting
    Kim, Jae-Kyung
    Taki, Kentaro
    Nagamine, Shinsuke
    Ohshima, Masahiro
    [J]. LANGMUIR, 2008, 24 (16) : 8898 - 8903