Real-Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method

被引：6

作者：

Tabuchi, T. ^{[1
]}

Bando, K. ^{[1
]}

Kondo, S. ^{[1
]}

Tomita, H. ^{[2
]}

Shiobara, E. ^{[2
]}

Hayashi, H. ^{[2
]}

Kato, H. ^{[3
]}

Nakamura, A. ^{[3
]}

Matsuura, Y. ^{[3
]}

Kondo, K. ^{[1
]}

机构：

[1] Rion Co Ltd, Tech Dev Ctr, Kokubunji, Tokyo 1858533, Japan

[2] Kioxia Corp, Inst Memory Technol Res & Dev, Proc Technol Res & Dev Ctr, Yokaichi 5128550, Japan

[3] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Tsukuba, Ibaraki 3058565, Japan

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2019年 / 32卷 / 04期

关键词：

Semiconductor device measurement; Atmospheric measurements; Particle measurements; Refractive index; Light scattering; Size measurement; Mathematical model; Brownian motion; diffusion coefficient equivalent size (DCES); flow particle tracking (FPT) method; physical properties of a particle; refractive index;

D O I：

10.1109/TSM.2019.2942847

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It is known that particle size obtained from Brownian motion of a particle is called the diffusion coefficient equivalent size (DCES) and is close to the geometric size independent of the physical properties of a particle. In this paper, it is described that real time measurement of the particle size and particle number concentration by observing the Brownian motion of the particles from which the influence of the flow field has been eliminated by the instrument combining the flow particle tracking (FPT) method and the L-shaped flow cell. Furthermore, we realized in evaluating the refractive index, which is the physical property information of the particles, from the DCES, the Rayleigh scattering equation and the light scattering intensity of particle that physical properties are known. In this paper, we also discuss that improvement of particle size accuracy and refractive index accuracy in the measurement of DCES.

引用

页码：460 / 464

页数：5

共 41 条

[41] A low-cost, label-free microfluidic scanning flow cytometer for high-accuracy quantification of size and refractive index of particles [J].

Reale, Riccardo ;

Peruzzi, Giovanna ;

Ghoreishi, Maryamsadat ;

Stabile, Helena ;

Ruocco, Giancarlo ;

Leonetti, Marco .

LAB ON A CHIP, 2023, 23 (08) :2039-2047

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