Ammonia sorptive properties of plasma polymer films obtained from hexamethyldisiloxane

被引：9
作者：
Georgieva, V [1 ]
Radeva, E [1 ]
Spassov, L [1 ]
机构：
[1] Bulgarian Acad Sci, Inst Solid State Phys, BU-1784 Sofia, Bulgaria
来源：
VACUUM | 2000年 / 58卷 / 2-3期
关键词：
plasma polymerization; thin films; chemical sensors; quartz resonators;
D O I：
10.1016/S0042-207X(00)00184-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The ability of plasma polymer films, obtained from hexamethyldisiloxane (HMDSO) to adsorb ammonia vapours in gas phase is studied. For this purpose, the polymer films are deposited on mass-sensitive quartz resonators. The dependence between the relative change of resonator's frequency due to the mass of sorbed ammonia vapours and ammonia concentration in gas phase is established. Ammonia vapours with concentrations from 10 to 10 000 ppm are used. The increase of the polymer thickness in the range of 0.09-0.24 mu m leads to an increase of the ammonia sorption capability of the samples. The characteristics of sorption process of the polymer films versus ammonia vapours are discussed. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：315 / 320
页数：6
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