Microstructural study of BaTiO3/SrTiO3 superlattice

被引：6

作者：

Tong, FQ ^{[1
]}

Yu, WX ^{[1
]}

Liu, YF ^{[1
]}

Zuo, Y ^{[1
]}

Ge, X ^{[1
]}

机构：

[1] Jilin Univ, Sch Mat Sci & Engn, Changchun 130023, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2003年 / 98卷 / 01期

关键词：

BaTiO3/SrTiO3; superlattice; small-angle x-ray diffraction interface and surface; microstructure; rms roughness;

D O I：

10.1016/S0921-5107(02)00409-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructure of BaTiO3 (BTO)/SrTiO3 (STO) superlattice grown on (001) STO substrate by laser molecular beam epitaxy (L-MBE) was investigated. The microstructural parameters of BTO/STO superlattice, such as the total film thickness, superlattice period, surface and interface root-mean-square (rms) roughness were obtained by computer simulation of the small-angle X-ray diffraction spectra. The results show that the interfaces and surface of the superlattice are very smooth; their rms roughness is about 2 Angstrom. The experimental examination of atomic force microscopy has proved the smoothness of the surface of the superlattice. There exists a little correlation along <001> direction of the surperlattice. The growth mechanism of the superlattice is discussed. By modified Bragg's law, the total thickness of the superlattice is calculated, and is consistent with that of the simulation of small-angle X-ray reflectivity. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：6 / 9

页数：4

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