Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation

被引:52
作者
Ballandras, S
Reinhardt, A
Laude, V
Soufyane, A
Camou, S
Daniau, W
Pastureaud, T
Steichen, W
Lardat, R
Solal, M
Ventura, P
机构
[1] Associe Univ Franche Comte, LPMO CNRS, UPR 3203, IMFC, F-25044 Besancon, France
[2] Temex Microelect, F-06904 Sophia Antipolis, France
关键词
D O I
10.1063/1.1758317
中图分类号
O59 [应用物理学];
学科分类号
摘要
The demand for high frequency surface acoustic wave devices for modern telecommunication applications imposes the development of devices able to answer the manufacturer requirements. The use of high velocity substrates for which a piezoelectric layer is required to excite and detect surface waves has been widely investigated and requires the implementation of accurate theoretical tools to identify the best combinations of material. The present paper proposes a mixed formulation combining finite element analysis with a boundary integral method to accurately simulate the capability of massive periodic interdigital transducers to excite and detect guided acoustic waves in layered media. The proposed model is exploited for different typical configurations. (C) 2004 American Institute of Physics.
引用
收藏
页码:7731 / 7741
页数:11
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