Texturing a pyramid-like structure on a silicon surface via the synergetic effect of copper and Fe(III) in hydrofluoric acid solution

被引：19

作者：

Cao, Ming ^{[1
]}

Li, Shaoyuan ^{[1
]}

Deng, Jianxin ^{[2
]}

Li, Yuping ^{[3
]}

Ma, Wenhui ^{[1
]}

Zhou, Yang ^{[1
]}

机构：

[1] Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Peoples R China

[2] Guangxi Univ, Sch Mech Engn, Guangxi Key Lab Mfg Syst & Adv Mfg Technol, Nanning 530004, Peoples R China

[3] Yunnan Univ, Fac Phys Sci & Technol, Kunming 650091, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2016年 / 372卷

基金：

高等学校博士学科点专项科研基金;

关键词：

Crystalline silicon; Pyramid-like structure; Synergetic effect; Cu nanoparticles and Fe(III); Assisted etching; MONOCRYSTALLINE SILICON; SOLAR-CELLS; FABRICATION; SI; TEXTURIZATION; EFFICIENCY; MECHANISM; WAFERS;

D O I：

10.1016/j.apsusc.2016.03.021

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An innovative approach is proposed to texture a pyramid structure on a silicon surface via Cu-catalyzed chemical etching in the HF/FeCl3 system. The surface and cross-section morphologies of the formed pyramid structure were examined by scanning electron microscopy and atomic force microscopy. The results revealed that numerous silicon pyramid-like structures with hemlines of 0.1 similar to 3 pin and height of 0.1 2 pin are close together, and the top angle of the pyramid structure is 90 degrees. Additionally, the systematic study of the effects of the etching time and the concentration of FeCl3 on the pyramid-like structures by the atom configuration model of silicon crystal faces demonstrated that the etching proceeds preferentially along the < 100 > directions of silicon. A formation mechanism of the pyramid-like structure is proposed. The results imply that the synergetic effect of Cu nanoparticles and Fe(III) could conveniently generate a pyramid-like architecture on the surface of silicon in hydrofluoric acid solution. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：36 / 41

页数：6

共 27 条

[1] The effect of front pyramid heights on the efficiency of homogeneously textured inline-diffused screen-printed monocrystalline silicon wafer solar cells [J].

Basu, Prabir Kanti ;

Khanna, Ankit ;

Hameiri, Ziv .

RENEWABLE ENERGY, 2015, 78 :590-598

[2] Liquid silicate additive for alkaline texturing of mono-Si wafers to improve process bath lifetime and reduce IPA consumption [J].

Basu, Prabir Kanti ;

Sarangi, Debajyoti ;

Shetty, Kishan Devappa ;

Boreland, Mathew Benjamin .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2013, 113 :37-43

[3] A simple and cost-effective approach for fabricating pyramids on crystalline silicon wafers [J].

Chu, A. K. ;

Wang, J. S. ;

Tsai, Z. Y. ;

Lee, C. K. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2009, 93 (08) :1276-1280

[4] Very high efficiency silicon solar cells - Science and technology [J].

Green, MA ;

Zhao, JH ;

Wang, AH ;

Wenham, SR .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (10) :1940-1947

[5] Thin-film silicon solar cells with efficient periodic light trapping texture [J].

Haase, Christian ;

Stiebig, Helmut .

APPLIED PHYSICS LETTERS, 2007, 91 (06)

[6] Microstructuring of silicon with femtosecond laser pulses [J].

Her, TH ;

Finlay, RJ ;

Wu, C ;

Deliwala, S ;

Mazur, E .

APPLIED PHYSICS LETTERS, 1998, 73 (12) :1673-1675

[7] Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer [J].

Huang, Bohr-Ran ;

Yang, Ying-Kan ;

Yang, Wen-Luh .

APPLIED SURFACE SCIENCE, 2013, 266 :245-249

[8] Metal-Assisted Chemical Etching of Silicon: A Review [J].

Huang, Zhipeng ;

Geyer, Nadine ;

Werner, Peter ;

de Boor, Johannes ;

Goesele, Ulrich .

ADVANCED MATERIALS, 2011, 23 (02) :285-308

[9] Metal grids-based texturization of monocrystalline silicon wafers for solar cells [J].

Li, Honghao ;

Liu, Weifeng ;

Liu, Aimin ;

Qiao, Fen ;

Hu, Zengquan ;

Liu, Yiting .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2010, 94 (06) :942-945

[10] Fabrication of porous silicon nanowires by MACE method in HF/H2O2/AgNO3 system at room temperature [J].

Li, Shaoyuan ;

Ma, Wenhui ;

Zhou, Yang ;

Chen, Xiuhua ;

Xiao, Yongyin ;

Ma, Mingyu ;

Zhu, Wenjie ;

Wei, Feng .

NANOSCALE RESEARCH LETTERS, 2014, 9 :1-8

← 1 2 3 →