Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template

被引：26

作者：

Wu, Jing-Tang ^{[1
]}

Chang, Wei-Yi ^{[1
]}

Yang, Sen-Yeu ^{[1
]}

机构：

[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 106, Taiwan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2010年 / 20卷 / 07期

关键词：

MICROLENSES; ARRAY;

D O I：

10.1088/0960-1317/20/7/075023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a novel and effective method for the fabrication of a polymeric nano/micro hybrid lens array. The nanostructure and microlens arrays are fabricated on the same polycarbonate ( PC) substrate by hot embossing in sequence. First, an anti-reflection PC film with sub-wavelength nanostructures is fabricated using an anodic aluminum oxide (AAO) template. The anti-reflection characteristic of nanostructures on the PC film is evaluated. Then an array of convex microlenses is formed from the nanostructured PC film using a stainless steel mold with a microhole array. Both processes employ gas-assisted hot embossing to perform the partial protrusion of the film into nano-sized or micro-sized holes in the AAO template and steel mold. The optical property of the microlens has been verified. This proposed technique has proven its potential for effectively fabricating a nano/micro hybrid lens array on a polymeric substrate.

引用

页数：6

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