Model based quantification of EELS spectra

被引:160
作者
Verbeeck, J [1 ]
Van Aert, S [1 ]
机构
[1] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium
关键词
EELS; fitting; quantification; precision; maximum likelihood; model;
D O I
10.1016/j.ultramic.2004.06.004
中图分类号
TH742 [显微镜];
学科分类号
摘要
Recent advances in model based quantification of electron energy loss spectra (EELS) are reported. The maximum likelihood method for the estimation of physical parameters describing an EELS spectrum, the validation of the model used in this estimation procedure, and the computation of the attainable precision, that is, the theoretical lower bound on the variance of these estimates, are discussed. Experimental examples on An and GaAs samples show the power of the maximum likelihood method and show that the theoretical prediction of the attainable precision can be closely approached even for spectra with overlapping edges where conventional EELS quantification fails. To provide end-users with a low threshold alternative to conventional quantification, a user friendly program was developed which is freely available under a GNU public license. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:207 / 224
页数:18
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