Effect of interactive damping on sensitivity of vibration modes of rectangular AFM cantilevers

被引：23

作者：

Chang, WJ ^{[1
]}

Fang, TH ^{[1
]}

Chou, HM ^{[1
]}

机构：

[1] Kun Shan Univ Technol, Dept Mech Engn, Tainan, Taiwan

来源：

PHYSICS LETTERS A | 2003年 / 312卷 / 3-4期

关键词：

atomic force microscope; sensitivity analysis; damping effect;

D O I：

10.1016/S0375-9601(03)00620-0

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The effect of interactive damping on the sensitivity of flexural and torsional vibration modes of an atomic force microscope (AFM) rectangular cantilever has been analyzed and a closed-form expression is derived. When the normal contact stiffness (beta(n)) is low, the following effects were observed: firstly the flexural sensitivities of the first three modes apparently fall when the normal damping effect is taken into account. The smaller the value of beta(n), the more the damping effect is. Secondly, the sensitivity of flexural mode I clearly decreases with increasing normal interactive damping coefficient. The higher damping coefficient can influence the larger range of beta(n) value. When the lateral contact stiffness (beta(t)) is low, the effects of the lateral damping on the torsional modal sensitivity are similar. The smaller the value of fit, the more the lateral damping effect is. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：158 / 165

页数：8

共 20 条

[11] Analysis of the high-frequency response of atomic force microscope cantilevers [J].