Surface acoustic wave device

被引：4
|
作者：
Mueller, C. [1 ]
Nateprov, A. [1 ]
Obermeier, G. [1 ]
Klemm, M. [1 ]
Tsurkan, V. [1 ]
Wixforth, A. [1 ]
Tidecks, R. [1 ]
Horn, S. [1 ]
机构：
[1] Univ Augsburg, Inst Phys, Univ Str 1, D-86159 Augsburg, Germany
来源：
ZINC OXIDE MATERIALS AND DEVICES II | 2007年 / 6474卷
关键词：
surface acoustic wave (SAW) devices; SAW-sensors; materials science with SAW;
D O I：
10.1117/12.714700
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Starting with an introduction to surface acoustic waves, their generation and detection using interdigital transducers (IDTs) on piezoelectric materials (e.g. LiNbO3 and ZnO) will be reviewed. Then the application of surface acoustic waves in electronic devices will be presented. Moreover, recent studies, using the technique of attaching the material of investigation onto the sound path of the acoustic delay line between the IDTs is discussed.
引用
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页数：13
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