Property of NOx gas sensor using,carbon nanotube prepared by thermal CVD method

被引：3

作者：

Ueda, T. ^{[1
]}

Bhuiyan, M. M. H. ^{[1
]}

Norimatsu, H. ^{[1
]}

Katsuki, S. ^{[1
]}

Ikegami, T. ^{[1
]}

机构：

[1] Kumamoto Univ, Grad Sch Sci & Technol, 2-39-1 Kurokami, Kumamoto 8608555, Japan

来源：

ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2 | 2007年 / 124-126卷

关键词：

carbon nanotube; gas sensor; NOx gas sensing; PLD; thermal CVD;

D O I：

10.4028/www.scientific.net/SSP.124-126.1253

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Carbon nanotube (CNT) gas sensors for NOx gas detection were prepared. CNTs were grown on an Al2O3 substrate with interdigital Pt-electrodes (Al2O3 ceramic substrate) using both pulsed laser deposition (PLD) and thermal chemical vapor deposition (CVD) method. In this method, Al buffer layer and Fe catalytic thin film were prepared on the substrate by PLD method and then CNTs were grown by thermal CVD method. Surface images of CNTs on the substrates were observed by SEM, and the gas sensing property specific to NO gas was measured. Resistance of the prepared CNTs gas sensor decreased with increase of sensor temperature, and it decreased with increase of NO gas concentration at room temperature.

引用

页码：1253 / +

页数：2

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