Highly sensitive and wearable bionic piezoelectric sensor for human respiratory monitoring

被引:52
作者
Yuan, Yangbo [1 ]
Chen, Hao [1 ]
Xu, Hongcheng [1 ]
Jin, Yujian [1 ]
Chen, Gang [1 ]
Zheng, Weihao [1 ]
Wang, Weidong [1 ,2 ]
Wang, Yuejiao [1 ,2 ]
Gao, Libo [3 ,4 ]
机构
[1] Xidian Univ, Sch Mechanoelect Engn, Xian 710071, Peoples R China
[2] CityU Xidian Joint Lab Micro Nanomfg, Shenzhen 518057, Peoples R China
[3] Xiamen Univ, Sch Aeronaut, Dept Mech & Elect Engn, Xiamen 361005, Peoples R China
[4] Xiamen Univ, Sch Aerosp Engn, Xiamen 361005, Peoples R China
基金
中国国家自然科学基金;
关键词
Piezoelectric sensor; Low detection limit; Bionic structure; Respiratory monitoring; PRESSURE SENSORS; TRANSPARENT;
D O I
10.1016/j.sna.2022.113818
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Flexible piezoelectric sensors hold great promising for applications in electronic skin (E-skin), wearable devices, and biomedical devices. However, it is still challenging to apply flexible piezoelectric sensors to respiratory health monitoring which requires an extremely low detection limit. To address this challenge, a flexible bionic piezoelectric sensor inspired by the lateral line structure of fish is proposed in this study. Benefited from the excellent piezoelectric effect of polyvinylidene fluoride (PVDF) and the bionic structural design, the proposed sensor has a low detection limit of 0.0005 N and can be conformal with a cylindrical surface. In addition, the sensor can accurately sense the pressure at a high sensitivity of 0.24 V N-1 with a fast response time of 4 ms and long-term repeatability of 4000 cycles. Through the design of back-end circuitry, the bionic sensor is capable of accurately monitoring of various respiratory states, such as apnea, coughing, and deep breathing. These results show that our sensor has great potential as a wearable device in the field of respiratory health monitoring, and is also highly inspiring for designing other types of flexible sensors.
引用
收藏
页数:9
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