Deposition of rock salt AlN coatings by magnetron sputtering

被引：11

作者：

Choudhary, R. K. ^{[1
]}

Mishra, P. ^{[1
]}

Hubli, R. C. ^{[1
]}

机构：

[1] Bhabha Atom Res Ctr, Mat Proc Div, Bombay 400085, Maharashtra, India

来源：

SURFACE ENGINEERING | 2014年 / 30卷 / 08期

关键词：

Cubic; AIN; Coating; Sputtering; Adhesion; EPITAXIAL-GROWTH; FILMS;

D O I：

10.1179/1743294414Y.0000000275

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Cubic aluminium nitride (AIN) coatings were successfully deposited on stainless steel 304L substrates by balanced magnetron sputtering. Grazing incidence X-ray diffraction measurement confirmed the formation of rock salt cubic AIN having a preferred orientation along (111) plane. Scanning electron microscopy revealed nodular microstructure of the coating. Thermal diffusivity of AIN coated sample was found to be significantly higher than that of the uncoated sample. Microscratch adhesion test showed no adhesive failure below 20 N loads.

引用

页码：535 / 539

页数：5

共 17 条

[1]

Duquenne C., 2012, J Phys D Appl Phys, V45, P1, DOI [10.1088/00223727/45/1/015301, DOI 10.1088/00223727/45/1/015301]

[2]

Junior A. F., 2004, CERAMICA, V50, P247, DOI DOI 10.1590/S0366-69132004000300012

[3] Magnetron sputtering: a review of recent developments and applications [J].

Kelly, PJ ;

Arnell, RD .

VACUUM, 2000, 56 (03) :159-172

[4] Effects of deposition parameters on the structure of AlN coatings grown by reactive magnetron sputtering [J].

Khanna, Atul ;

Bhat, Deepak G. .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (03) :557-565

[5] EPITAXIAL-GROWTH OF CUBIC ALN FILMS ON (100)SILICON AND (111)SILICON BY PULSED-LASER ABLATION [J].

LIN, WT ;

MENG, LC ;

CHEN, GJ ;

LIU, HS .

APPLIED PHYSICS LETTERS, 1995, 66 (16) :2066-2068

[6] Electrical characterization and morphological properties of AlN films prepared by dc reactive magnetron sputtering [J].

Moreira, M. A. ;

Doi, I. ;

Souza, J. F. ;

Diniz, J. A. .

MICROELECTRONIC ENGINEERING, 2011, 88 (05) :802-806

[7] MBE growth of atomically smooth non-polar cubic AlN [J].

Schupp, T. ;

Lischka, K. ;

As, D. J. .

JOURNAL OF CRYSTAL GROWTH, 2010, 312 (09) :1500-1504

[8]

Shanmugan S., 2012, IJASCSE, V1, P1

[9] Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating [J].

Singh, Atul Vir ;

Chandra, Sudhir ;

Bose, G. .

THIN SOLID FILMS, 2011, 519 (18) :5846-5853

[10] Progress in coating development for fusion systems [J].

Smith, DL ;

Park, JH ;

Lyublinski, I ;

Evtikhin, V ;

Perujo, A ;

Glassbrenner, H ;

Terai, T ;

Zinkle, S .

FUSION ENGINEERING AND DESIGN, 2002, 61-62 :629-641

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