Water as an ideal solvent for the synthesis of easily hydrolyzable compounds:: High-yield preparation of 2-pyrrolecarbaldimines and their CVD/ALD-relevant Cu(II) derivatives in H2O

被引:35
作者
Grushin, VV [1 ]
Marshall, WJ [1 ]
机构
[1] DuPont Co Inc, Cent Res & Dev, Expt Stn, Wilmington, DE 19880 USA
关键词
chelating agents; chemical vapor deposition; copper; imines; Schiff bases;
D O I
10.1002/adsc.200404181
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
Water was found to be an ideal solvent for the remarkably high-yield, fast preparation of easily hydrolyzable 2-pyrrolecarbaldimines. In the presence of Cu2+, the reaction afforded, in one step, the corresponding Cu(II) chelates which were demonstrated to meet the initial set of current microelectronics criteria for Cu metal deposition via a CVD/ALD process. Electronic effects of the substituent on the imino nitrogen of the Cu complexes were shown to strongly influence the coordination geometry at the Cu center.
引用
收藏
页码:1457 / 1460
页数:4
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