Coherent hard x-ray diffractive imaging of nonisolated objects confined by an aperture

被引:6
作者
Kim, Sunam [1 ]
Kim, Chan [1 ]
Lee, Suyong [1 ]
Marathe, Shashidhara [1 ]
Noh, D. Y. [1 ]
Kang, H. C. [2 ,3 ]
Kim, S. S. [4 ]
Sandy, A. [4 ]
Narayanan, S. [4 ]
机构
[1] Gwangju Inst Sci & Technol, Dept Mat Sci & Engn & Nanobio Mat & Elect, Grad Program Photon & Appl Phys, Kwangju 500712, South Korea
[2] Chosun Univ, Dept Adv Mat Engn, Kwangju 501759, South Korea
[3] Chosun Univ, Educ Ctr Mould Technol Adv Mat & Parts BK21, Kwangju 501759, South Korea
[4] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA
来源
PHYSICAL REVIEW B | 2010年 / 81卷 / 16期
基金
新加坡国家研究基金会;
关键词
CRYSTALLOGRAPHY; MICROSCOPY; SCATTERING;
D O I
10.1103/PhysRevB.81.165437
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Coherent hard x-ray imaging of nonisolated weak phase objects is demonstrated by confining x-ray beam in a region of a few micrometers in cross section using a micrometer-sized aperture. Two major obstacles in the hard x-ray coherent diffraction imaging, isolating samples and obtaining central speckles, are addressed by using the aperture. The usefulness of the proposed method is illustrated by reconstructing the exit wave field of a nanoscale trench structure fabricated on silicon which serves as a weak phase object. The quantitative phase information of the exit wave field was used to reconstruct the depth profile of the trench structure. The scanning capability of this method was also briefly discussed.
引用
收藏
页数:5
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