Features of plasma structure observed in high-current quasi-stationary magnetron discharge

被引：3
作者：
Kaziev, Andrey V. [1 ]
Kharkov, Maxim M. [1 ]
Khodachenko, Georgy V. [1 ]
Tumarkin, Alexander V. [1 ]
机构：
[1] Natl Res Nucl Univ MEPhI, Dept Plasma Phys, Moscow Engn Phys Inst, 31 Kashirskoye Shosse, Moscow 115409, Russia
来源：
SURFACE & COATINGS TECHNOLOGY | 2016年 / 293卷
关键词：
Impulse magnetron discharge; Quasi-stationary phase; Fast imaging; Plasma spokes; Current-voltage characteristic; Ionization instability;
D O I：
10.1016/j.surfcoat.2015.12.074
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The plasma structures in a high-current impulse magnetron discharge (HCIMD) were studied by means of a fast gated camera facing the cathode target, made from Cu, Ti, and Mo. The current-voltage characteristics of HCIMD were obtained for the range of transverse magnetic field on the cathode surface B-s = 40-65 mT and working gas (Ar) pressures p(Ar) = 0.5-2 Pa. Fast camera images were recorded throughout the pulses for all experimental regimes, and the regions of plasma non-uniformity were found. The I-V curves studied in detail revealed from three to five distinct discharge regimes with quite different plasma appearance and behaviour, depending on the target material. Our observations of the initial stage of HCIMD indicate that in a certain discharge current range there is a characteristic time (similar to tens mu s) needed for the azimuthally symmetric structure of spokes to build up, even while the discharge current remains constant. During a quasi-stationary stage of HCIMD a well-defined spoke structure may rotate or remain stable depending on the discharge power. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：48 / 54
页数：7
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