LOW-FREQUENCY NOISE MEASUREMENT OF A HIGHLY STABLE CHARGE-METER

被引：0

作者：

Nihtianov, Stoyan ^{[1
]}

Guo, Xiaodong ^{[2
]}

机构：

[1] ASML Netherlands BV, Run 6501, NL-5504 DR Veldhoven, Netherlands

[2] Delft Univ Technol, Dept Elect Instrumentat Lab, \, NL-2628 CD Delft, Netherlands

来源：

2009 AFRICON, VOLS 1 AND 2 | 2009年

关键词：

low-frequency noise; stability; charge-meter; drift;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

A successful effort is reported on an accurate measurement of the low-frequency (1/f) noise and the thermal stability of the charge-meter presented in [1]. These two parameters are very important for the charge-meter, as its main application is to interface capacitive sensors with extremely high long-term stability and low thermal drift. A measurement strategy for the low-frequency noise behavior of the charge-meter is reported. A particular test setup was built and a special test strategy was created to reduce the different kinds of external low-frequency interference to a minimum. This allowed the low-frequency component of the intrinsic input noise of the charge-meter to be measured accurately. An extremely low value of the low-frequency (1/f) noise with corner frequency 2 mHz, and a very high thermal stability of 2 ppm/K of the charge-meter, are reported.

引用

页码：113 / 118

页数：6

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