Fabrication and photonic band gap property of the two-dimensional square lattice based on silicon

被引：3

作者：

Zhou, M ^{[1
]}

Chen, XS ^{[1
]}

Xu, J ^{[1
]}

Lu, W ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China

来源：

ACTA PHYSICA SINICA | 2004年 / 53卷 / 10期

关键词：

photonic crystal; photonic band gap; reflection spectrum; FDTD;

D O I：

10.7498/aps.53.3583

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Two-dimensional air-cylinder photonic crystals were fabricated based on silicon by using the multiplex inductively coupled plasma system supplied by STS company. Photonic band gap was theoretically calculated by using the finite different time domain (FDTD) method, and the reflection spectrum was measured experimentally using the microscope infrared spectrometer instrument. We find that the reflection measurements are in good agreement with the theoretically expected behaviour.

引用

页码：3583 / 3586

页数：4

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