共 32 条
[1]
[Anonymous], AT SPECTR DAT
[2]
Böhme O, 2001, ADV MATER, V13, P597
[6]
The United Kingdom Chemical Database Service
[J].
JOURNAL OF CHEMICAL INFORMATION AND COMPUTER SCIENCES,
1996, 36 (04)
:746-749
[7]
GARRELIE F, 2006, P SPIE, V6261
[9]
Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2008, 26 (03)
:472-480