Structural investigation of thin films and multilayers using X-ray scattering

A non-destructive characterization of the structure in nanostructured thin films and multilayers is an area of significant importance. In this context the grazing incidence X-ray scattering (GIXS) technique has become a powerful tool. In the present paper the various parameters that define the structure in thin films and multialyers are discussed together with their origin. The GIXS theory relevant to determining these parameters is then discussed in brief. The applicability of the GIXS technique to various materials is clearly demonstrated through examples ranging from Pt-BN composite thin films to Ni-Nb/C multilayers to organic multilayers made from Cd-arachidate and Zn-arachidate (metal substituted fatty acid salts). The structural parameters of these thin films and multilayers were determined using GIXS irrespective of their nature inorganic or organic, indicating the suitability of this method for 3-dimensional structural characterization.