Sinusoidal phase-modulating interferometer with ellipse fitting and a correction method

被引：46

作者：

Ni, Chang ^{[1
,2
]}

Zhang, Ming ^{[1
,2
]}

Zhu, Yu ^{[1
,2
]}

Hu, Chuxiong ^{[1
,2
]}

Ding, Siqi ^{[3
]}

Jia, Zhe ^{[3
]}

机构：

[1] Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol, Beijing 100084, Peoples R China

[2] Tsinghua Univ, Beijing Lab Precis Ultraprecis Mfg Equipment & Co, Beijing 100084, Peoples R China

[3] Beijing U Precis Tech Co Ltd, Beijing 100084, Peoples R China

来源：

APPLIED OPTICS | 2017年 / 56卷 / 13期

基金：

中国国家自然科学基金;

关键词：

CYCLIC ERROR; LASER-DIODE; COMPENSATION;

D O I：

10.1364/AO.56.003895

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In a sinusoidal phase-modulating interferometer, sinusoidal modulation of the phase of the laser or the reference wave is necessary. However, modulation of the phase also involves an intensity modulation of the light, which leads to a measurement error if conventional signal processing is used. In addition, the error of modulation depth and the phase delay of demodulation also increase the measurement error. A novel signal processing, with ellipse fitting and a correction method, is proposed. Numerical simulation results and experimental results prove that the novel signal processing can compensate for the measurement error caused by the intensity modulation, the error of modulation depth, and the phase delay of demodulation. (C) 2017 Optical Society of America

引用

页码：3895 / 3899

页数：5

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